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1

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, United States (Sunday 22 February 2015)] Alternative Lithographic Technologies VII - Massively parallel E-beam inspection: enabling next-generation patterned defect inspection for wafer and mask manufacturing

Resnick, Douglas J., Bencher, Christopher, Malloy, Matt, Thiel, Brad, Bunday, Benjamin D., Wurm, Stefan, Mukhtar, Maseeh, Quoi, Kathy, Kemen, Thomas, Zeidler, Dirk, Eberle, Anna Lena, Garbowski, Tomas

Year:

2015

Language:

english

File:

PDF, 694 KB

english, 2015

2

Measuring multielectron beam imaging fidelity with a signal-to-noise ratio analysis

Mukhtar, Maseeh, Bunday, Benjamin D., Quoi, Kathy, Malloy, Matt, Thiel, Brad

Journal:

Journal of Micro/Nanolithography MEMS and MOEMS

Year:

2016

Language:

english

File:

PDF, 4.03 MB

english, 2016

3

Patterned Wafer Inspection with Multi-beam SEM Technology

Thiel, Brad, Mukhtar, Maseeh, Quoi, Kathy, Bunday, Benjamin D., Malloy, Matt

Journal:

Microscopy and Microanalysis

Year:

2016

Language:

english

File:

PDF, 517 KB

english, 2016

4

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, United States (Sunday 22 February 2015)] Metrology, Inspection, and Process Control for Microlithography XXIX - Further advancing the throughput of a multi-beam SEM

Cain, Jason P., Sanchez, Martha I., Kemen, Thomas, Malloy, Matt, Thiel, Brad, Mikula, Shawn, Denk, Winfried, Dellemann, Gregor, Zeidler, Dirk

Year:

2015

Language:

english

File:

PDF, 1.23 MB

english, 2015

5

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, United States (Sunday 22 February 2015)] Metrology, Inspection, and Process Control for Microlithography XXIX - Simulating massively parallel electron beam inspection for sub-20 nm defects

Cain, Jason P., Sanchez, Martha I., Bunday, Benjamin D., Mukhtar, Maseeh, Quoi, Kathy, Thiel, Brad, Malloy, Matt

Year:

2015

Language:

english

File:

PDF, 1.80 MB

english, 2015

6

SPIE Proceedings [SPIE 31st European Mask and Lithography Conference - Eindhoven, Netherlands (Monday 22 June 2015)] 31st European Mask and Lithography Conference - Enabling inspection solutions for future mask technologies through the development of massively parallel E-Beam inspection

Behringer, Uwe F.W., Finders, Jo, Malloy, Matt, Thiel, Brad, Bunday, Benjamin D., Wurm, Stefan, Jindal, Vibhu, Mukhtar, Maseeh, Quoi, Kathy, Kemen, Thomas, Zeidler, Dirk, Eberle, Anna Lena, Garbowski,

Year:

2015

Language:

english

File:

PDF, 997 KB

english, 2015

7

Gay Men’s (Non)Monogamy Ideals and Lived Experience

van Eeden-Moorefield, Brad, Malloy, Kevin, Benson, Kristen

Journal:

Year:

2016

Language:

english

File:

PDF, 525 KB

english, 2016

8

Stepfamilies: A Global Perspective on Research, Policy, and Practice

van Eeden-Moorefield, Brad, Malloy, Kevin

Journal:

Journal of Family Theory & Review

Year:

2015

Language:

english

File:

PDF, 475 KB

english, 2015

9

[IEEE 2015 26th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) - Saratoga Springs, NY, USA (2015.5.3-2015.5.6)] 2015 26th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) - Enabling future generation high-speed inspection through a massively parallel e-beam approach

Malloy, Matt, Bunday, Benjamin, Wurm, Stefan, Thiel, Brad, Kemen, Thomas, Zeidler, Dirk, Eberle, Anna Lena, Garbowski, Tomasz, Dellemann, Gregor, Peters, Jan Hendrik

Year:

2015

Language:

english

File:

PDF, 990 KB

english, 2015

10

Multiple-Beam Scanning Electron Microscopy

Lena Eberle, Anna, Schalek, Richard, Lichtman, Jeff W., Malloy, Matt, Thiel, Brad, Zeidler, Dirk

Journal:

Microscopy Today

Year:

2015

Language:

english

File:

PDF, 1.40 MB

english, 2015

11

SPIE Proceedings [SPIE SPIE Scanning Microscopies - Monterey, California, United States (Tuesday 16 September 2014)] Scanning Microscopies 2014 - Assessing the viability of multi-electron beam wafer inspection for sub-20nm defects

Postek, Michael T., Newbury, Dale E., Platek, S. Frank, Maugel, Tim K., Thiel, Brad, Lercel, Michael, Bunday, Benjamin, Malloy, Matt

Year:

2014

Language:

english

File:

PDF, 464 KB

english, 2014

12

Patterned Wafer Inspection with Multi-beam SEM Technology

Thiel, Brad, Mukhtar, Maseeh, Quoi, Kathy, Bunday, Benjamin D., Malloy, Matt

Journal:

Microscopy and Microanalysis

Year:

2016

File:

PDF, 517 KB

2016

13

An Art Teacher Can Become an Artist-In-Residence

Kantner, Kathy Dobash, Abraczinskas, Jen, Malloy, Brad

Journal:

Gifted Child Today

Year:

1998

File:

PDF, 812 KB

1998

14

Image Simulation and Analysis to Predict the Sensitivity Performance of a Multi-Electron Beam Wafer Defect Inspection Tool

Mukhtar, Maseeh, Quoi, Kathy, Bunday, Benjamin D, Malloy, Matt, Thiel, Brad

Journal:

Microscopy and Microanalysis

Year:

2016

Language:

english

File:

PDF, 453 KB

english, 2016